In the FPD industry with its pursuit of higher and higher yields, there is a strong need for real-time measurement of film thickness at each process stage. Our inline film thickness gauge quickly detects any abnormality in film thickness, something that can originate from any number of problems. Damage is thus suppressed to the minimum, changes to processing conditions can be easily made and the maintenance of optimum conditions is thus simplified.

Corresponding films	Film types: Resist, ITO, orientation layer, etc.
	Substrates: Si, BK7, Quartz, Cr, PET, etc.
Target thickness range	Between 10 nm and 10 μm
Repeatability	0.1 nm	Precision	±2 nm
Measurement algorithm	1. Film thickness value measurement 2. Film thickness value, refractive index, absorption coefficient, and simultaneous measurement

Off-line sampling inspection & measurement
Early detection of defects is difficult with both inspection during the final stage of processing and spot checking or sampling inspection, and product data cannot be employed to improve the conditions of each process.

Defect detection is delayed
> There is a risk of defective lots and process losses being generated

Data is left unmanaged or only sampling data is managed
> It is difficult to ascertain the causes and tendencies of defect generation
> It is difficult to apply data towards improvement of facilities and processes

Inline total inspection & measurement
Inline total substrate inspection can discover the origin of defects in an instant and can minimize both processing and product loss. By then saving and managing the data for all substrates, that data can be used to improve both processes and equipment.

Early defect detection
> Enables early removal of defective products and control of lost time in each process

Data management for each product (full lot and per substrate)
> Allows analysis into the causes and tendencies of defect generation
> Can be reflected in improvements to facilities and processes

Inspection and measurement of all film thickness (each substrate) during each process

Designed in pursuit of optimal performance for inline measurement

• LED light source for maintenance free operation
• Easy-installation fiber head
• Excellent anti-distance fluctuation characteristics
• High-speed measurement
• Enhanced trigger mode indispensable to inline operation