• Glass substrate edge inspection equipment
• In-line integration into the wafer production line is possible

Substrate type	Transparent glass
Substrate size	Max. 700 mm x 920 mm
Defect size	0.1 mm or larger (50 µm to 100 µm is a gray area. Detection is possible depending upon the type of defect.)
Inspection time	Approx. 20 sec/substrate