Processing exactly as the recipe dictates greatly reduces the rate of defective substrates

Carrying out processing according to the specified recipe is an important factor in ensuring a constant quality of substrates. By monitoring such points as the oscillation of the sprayer, something that affects the amount of resist coating as well as the uniformity of the chemical solution, you can constantly check whether substrates are being handled in each process according to the corresponding recipe or not.

If any abnormality is observed, notification is sent, the cause is identified, and positive results are thus demonstrated through the prevention of defective substrates.

Trouble factors can be easily identified by inquiring into the history of the substrates

When defective substrates are generated even though processing was completed according to the recipe, it is difficult to identify the specific origin of the problem if the process in which that substrate was processed is not fully understood.

CrystalFlow records the history of each substrate in each process. This makes it easy to determine the location of the trouble that is causing defects to be generated along the production line and to then correct that situation.